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用离子束分析技术对化薄膜进行表征

M S Rihawy1, B Abdallah1, A Wassouf1

  • 1Department of Physics, Atomic Energy Commission, P.O. Box 6091, Damascus, Syria.

Applied radiation and isotopes : including data, instrumentation and methods for use in agriculture, industry and medicine
|February 10, 2024
PubMed
概括

这项研究使用离子束分析分析化 (AlN) 薄膜. 基质温度显著影响AlN薄膜深度配置和密度,观察到氧含量微不足道.

关键词:
阿尔尼电影AlN电影深度分析 (depth profiling) 是一种深度分析方法.弹性反向散射是一种弹性反向散射.核反应分析 核反应分析真空弧放电是什么意思 真空弧放电是什么意思

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Mass Spectrum: Interpretation01:24

Mass Spectrum: Interpretation

An unknown compound can be established by identifying the molecular ion peak in the mass spectrum. The molecular ion peak is often weak or absent due to the predominance of fragmentation in high-energy electron beams. In such cases, a soft-energy electron beam can be used to scan the spectrum to enhance the intensity of the molecular ion peak. Additionally, chemical ionization, field ionization, and desorption ionization spectra are used to obtain a relatively intense molecular ion peak.To...