相关实验视频
Updated: May 12, 2026

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Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
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概括
一种新的 femtosecond激光直接写作辅助液体反蚀刻 (FsLDW-LBE) 方法使酸 (LN) 晶体的高效3D微型制造成为可能. 该技术实现了高表面质量,并增强了非线性光学特性,为集成光子学开辟了新的途径.
科学领域:
- 材料科学 材料科学 材料科学
- 光学是什么?光学是什么?光学是什么?
- 纳米技术纳米技术
背景情况:
- 酸 (LN) 对于集成光子学至关重要.
- 在LN上高效制造3D微/纳米结构仍然具有挑战性.
研究的目的:
- 开发一种有效的方法,用于3D微制造酸.
- 为了实现高表面质量和增强LN结构的非线性光学特性.
主要方法:
- 五秒激光直接写作辅助液体背蚀刻 (FsLDW-LBE) 技术.
- 制造各种3D微观结构,包括雪花,阵列和螺旋.
- 表面质量的表征 (Ra = 0.422 nm).
主要成果:
- 在LN晶体上成功制造了各种3D微结构.
- 一个微孔阵列的演示显示了第二波信号的12倍增强.
- 实现了适合光学应用的高表面质量.
结论:
- FsLDW-LBE方法为LN的3D微制造提供了一种新的方法.
- 这种技术对开发基于酸的先进非线性光学设备充满希望.
- 能够精确设计LN纳米结构以获得增强的光子功能.
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