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在高粘度流体的槽模涂层中产生泡缺陷的机制

Zikeng Fang¹, Ying Yan¹, Chenghang Li¹

¹State Key Laboratory of High-performance Precision Manufacturing, Dalian University of technology, Dalian 116024, China.

ACS applied materials & interfaces

|February 16, 2024

概括

在槽模涂层过程中防止高粘度薄膜中的气泡,需要了解上游阴茎的行为. 流改变了动态接触角度,导致空气携带和缺陷.

科学领域:

材料科学材料科学材料科学
流体动力学流体动力学
化学工程是化学工程的重要组成部分.

背景情况:

槽模涂层对于高精度的片制作至关重要.
防止像高粘度薄膜中的气泡这样的缺陷是一个关键的挑战.
对于无缺陷涂层来说,很难确定最佳的操作参数.

研究的目的:

为了研究在各种槽模涂层参数下的上游半径变化.
了解高粘度薄膜中空气吸入的机制.
识别导致缺陷形成的操作条件.

主要方法:

使用了结合模拟和实验方法的方法.
分析的重点是上游月经的行为.
研究了两种空气引入模式 (惯性主导和粘性主导).

主要成果:

在上游半月体底部观察到流 (顺时针和反时针).
这些旋导致了明显动态接触角度 (70°-75°至135°-140°) 的显著波动.
这些波动被确定为空气携带和气泡形成的原因.

结论:

了解上游阴茎动态对于防止槽模涂层缺陷至关重要.
引发的接触角度变化是空气携带的主要原因.
这项研究为优化高质量片的槽模涂层工艺提供了洞察力.

关键词:

空气输入机制的机理.看似的动态接触角度.泡缺陷泡缺陷泡缺陷高粘度的流体高粘度的流体.插槽模具涂层的涂层.

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