在原子探测器样本的现场金属涂层,以提高产量,性能和增加视野
Tim M Schwarz1, Eric Woods1, Mahander P Singh1
1Department of Microstructure Physics and Alloy Design, Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, Düsseldorf 40237, Germany.
概括
聚焦离子束在现场涂层原子探头标本与薄金属薄膜增强数据质量和产量. 这种技术提高了质量分辨率和视野,有利于各种材料分析.
科学领域:
- 材料科学 材料科学 材料科学
- 分析化学 分析化学
- 表面科学是一门学科.
背景情况:
- 原子探头断层扫描 (APT) 需要直径小于100纳米的标本,这些标本是脆弱的和反应性的.
- 缺陷如隙和沉物会对APT产量和数据质量产生负面影响.
- 之前的合规涂层是在现场应用的,缺乏统一性.
研究的目的:
- 开发和演示一种现场聚焦离子束 (FIB) 方法,用于在APT标本上涂上符合性金属涂层.
- 评估现场涂层对APT标本产量,数据质量和分析性能的影响.
- 评估这种技术在各种材料中的广泛应用.
主要方法:
- 在样本准备后立即使用微操纵器和FIB喷 (Ga或Xe离子) 在现场控制细金属薄膜 (例如Cr) 的沉积.
- 在金属和非金属标本上涂料的应用.
- 使用APT对涂层样本的分析.
主要成果:
- 显著提高APT数据质量和样本产量.
- 改进了质量分辨率和扩大了有效视野.
- 启用了整个原始标本的可视化,包括表面氧化物层.
结论:
- 在现场FIB涂层是一种简单有效的方法来增强APT分析.
- 该技术在数据质量,产量和分析能力方面提供了实质性的改进.
- 这种方法对原子探头断层扫描的广泛采用非常有吸引力.
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