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强度为100keV的X射线以多层反射光学进行亚微米聚焦

Takahisa Koyama¹, Hirokatsu Yumoto¹, Takanori Miura¹

¹Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan.

Journal of synchrotron radiation

|February 22, 2024

概括

一种新型的高流量X射线聚焦系统实现了对100keVX射线的微米分辨率. 这种先进的系统能够清晰地图像细微的图案,为详细的非破坏性分析铺平了道路.

科学领域:

物理物理学物理
材料科学材料科学材料科学
光学是什么?光学是什么?光学是什么?

背景情况:

高流量X射线聚焦对于先进的成像和材料分析至关重要.
现有的系统往往缺乏用于亚微米尺度调查所需的分辨率或流量.
多层光学为高性能X射线聚焦应用提供了潜力.

研究的目的:

为100keV的X射线构建和评估一个高流量亚微米X射线聚焦系统.
在光束大小,流量和分辨率方面评估系统的性能.
证明系统适用于非破坏性分析的可用性.

主要方法:

在Kirkpatrick-Baez几何学中构建多层聚焦镜系统.
在SPring-8波浪器光束线BL05XU的性能评估使用100keV的X射线束.
在不同的聚焦条件下测量聚焦束的大小和流量.
使用西门子星图与200纳米线和空间图案的分辨率测试.

主要成果:

聚焦镜系统实现了5%的宽带宽和74%的峰值反射率.
直接聚焦产生了0.32微米 (V) ×5.3微米 (H) 的光束大小,流量为1 × 10^12光子/秒.
使用二次源聚焦将光束大小减少到0.25 μm (V) ×0.26 μm (H),其流量为6 × 10^10光子/秒.
该系统清晰地解析了200纳米的线条和空间图案,展示了微米以下的分辨率.

结论:

开发的高流量亚微米聚焦系统对100keVX射线有效.
该系统提供高分辨率和流量,适用于先进的成像.
这项技术适用于各种需要微米分辨率的非破坏性分析.

关键词:

100 keV的X射线可以提供.高能X射线是一种高能X射线.多层聚焦镜的多层聚焦镜.多层单色化器是多层单色化器.扫描传输成像扫描传输成像

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