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为MEMS陀螺仪在全温度范围内的冲击保护结构设计

Yingyu Xu^1,2, Jing Lin³, Chunhua He¹

¹School of Computer, Guangdong University of Technology, Guangzhou 510006, China.

|February 24, 2024

概括

一种新型的抗冲击结构 (SPS) 显著提高了微电机系统 (MEMS) 陀螺仪的可靠性. 该SPS提高了13倍的抗冲击能力,在极端条件下防止故障.

科学领域:

机械工程机械工程
材料科学材料科学材料科学
可靠性工程可靠性工程

背景情况:

微电机系统 (MEMS) 陀螺仪对于各种应用非常重要.
冲击是限制MEMS陀螺仪可靠性的主要因素.
现有的设计需要增强的抗冲击性能,以便在不同温度范围内可靠运行.

研究的目的:

为MEMS陀螺镜提出和验证一个防冲击结构 (SPS).
为了提高MEMS陀螺仪的抗冲击性和可靠性.
为了确保在广泛的温度范围内 (-40°C至80°C) 的性能.

主要方法:

使用单自由度和双自由度模型推导冲击传递函数.
扣除U折梁刚度和最大正应力用于抗冲击性能评估.
使用理论模型在Matlab中模拟和分析频率响应.
在最坏的情况下通过冲击测试进行实验验证.

主要成果:

当SPS一阶自然频率为陀螺仪共振频率的1/4时,可以实现最佳的冲击保护.
SPS可以将MEMS陀螺仪加速峰值降低约23.5dB.
抗冲击能力在整个温度范围内增强了13倍.
没有SPS的MEMS陀螺仪因光束断裂而发生故障;带有SPS的陀螺仪正常工作.

结论:

拟议的SPS有效地提高了MEMS陀螺仪的抗冲击性和可靠性.
SPS设计保持了陀螺仪的性能,同时显著提高了它的耐用性.
该SPS被验证为一个强大的解决方案,适用于恶劣的操作环境和极端温度.

关键词:

在 MEMS 陀螺仪上使用旋转镜.可靠性设计可靠性设计冲击模型冲击模型热可靠性热可靠性

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