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时间域敏度的表征 MEMS 加速度计

Enfu Li¹, Jiaying Jian², Fan Yang¹

¹School of Engineering, Huzhou University, Huzhou 313000, China.

|February 24, 2024

概括

这项研究描述了MEMS加速计的灵敏度,发现振幅和频率的降低提高了性能. 时间域传感器中可调节的灵敏度为惯性传感器中范围自适应提供了理论基础.

科学领域:

* 微电子机械系统 (MEMS) 技术
* 惯性传感感应
* 时间域信号处理

背景情况:

*MEMS加速度计对于运动检测至关重要.
*表征灵敏度是性能优化的关键.
* 时间域分析为传感器行为提供了独特的见解.

研究的目的:

* 描述一个时域MEMS加速度计的灵敏度.
* 调查振幅,频率和灵敏度之间的关系.
* 建立在惯性传感器中范围自适应的基础.

主要方法:

* 开发的时间域MEMS加速度计的实验评估.
* 灵敏度的测量定义为每次引力加速的测量时间间隔的增加.
* 分析不同幅度的灵敏度和噪声.

主要成果:

* 灵敏度范围从-68.91μs/g到-124.96μs/g之间.
* 降低振幅和频率可以提高灵敏度.
* 较大的振幅会导致较小的灵敏度和噪声增加.

结论:

* 在时间域MEMS加速度计中证明了可调节的灵敏度.
* 结果为范围自适应提供了理论基础.
*结果适用于其他时间域惯性传感器,如陀螺仪和倾斜计.

关键词:

在MEMS MEMS中使用.加速度计的加速计是什么?可调节的灵敏度可以调节.惯性传感器是一种无动态传感器.时间域测量时间域测量

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