一个高压隔离的MEMS四电极变压器,具有特定的绝缘障碍,用于小型化的电隔离电源应用
Changnan Chen1,2, Pichao Pan1,2, Jiebin Gu1
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromachines
|February 24, 2024
概括
这项研究引入了使用微型造制造的新型高压 (HV) 隔离的MEMS四电磁变压器. 这些紧型变压器为隔离门驱动器和电源提供高感应率和高效率.
科学领域:
- 电气工程 电气工程
- 材料科学 材料科学 材料科学
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
背景情况:
- 紧而高效的电源供应对于集成电子设备至关重要.
- 现有的高压 (HV) 隔离解决方案通常面临大小和效率的限制.
- 微电子机械系统 (MEMS) 提供了小型化和集成功率组件的途径.
研究的目的:
- 报告晶圆级制造的MEMS四电磁体变压器的开发和特征.
- 为了证明高压 (HV) 隔离能力用于紧的电源应用.
- 为了评估这些变压器对隔离门驱动器和偏移电源的性能.
主要方法:
- 使用一种新的MEMS微型造技术进行晶圆层制造.
- 3D电感线圈的单立体集成与插入的铁磁芯.
- 感应强度,直流电阻,故障电压,功率转移效率和和电流的表征.
主要成果:
- 在6毫米2的足迹中,实现了743.2nH的高感应值,具有低直流电阻 (0.39 Ω).
- 由于嵌入的蛇形形SiO2隔离屏障,证明了超过2kV的故障电压.
- 展示了超过80%的功率传输效率和1.4A双相和电流.
结论:
- 开发的MEMS四电磁转换器适用于紧的,高效的,HV隔离的门驱动器和偏移电源.
- 这种新的微型造技术可以实现高感应强度的集成密度和强大的隔离.
- 这些变压器解决了集成电源解决方案的实际需求,需要高压隔离.
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