使MEMS

Keita Nagai1, Naohiro Sugita2, Tadahiko Shinshi2

  • 1Department of Mechanical Engineering, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8503, Japan.

Micromachines
|February 24, 2024
PubMed
概括

一种新的磁性模式转移 (MPT) 方法使微电子机械系统 (MEMS) 磁铁的微型多极磁化成为可能. 这种技术克服了自我去磁化问题,提高了磁流密度,提高了设备性能.

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