氧化物纳米线阵列的区域选择性生长用于压电采集能量

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Frank Eric Boye Anang1,2, Xuanwei Wei1, Jiushuai Xu1

  • 1Institute of Semiconductor Technology, TU Braunschweig, 38104 Braunschweig, Germany.

Micromachines
|February 24, 2024
PubMed
概括

氧化纳米线在基板上的区域选择性生长使压电纳米发电机 (PENGs) 成为可能. 添加SU-8聚合物层显著提高了设备输出电压,用于增强的能量收集应用.

关键词:
在CBD的增长中,CBD的增长.在MEMS MEMS中使用.企 (PENG PENG) 是一个非常重要的城市.在 SU-8 聚合物中,ZnO纳米线阵列中的纳米线.面积选择性的增长.

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