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Updated: Jul 7, 2026

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面具移动石墨法为微镜阵列的高精度表面制造方法

Jianwen Gong1,2,3, Ji Zhou1,3, Junbo Liu1,3

  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

Micromachines
|February 24, 2024
PubMed
概括

微镜阵列的新制造方法显著减少了表面误差和粗度. 这种高精度技术通过最小化形状偏差和实现纳米级表面光滑度来提高光学性能.

关键词:
反向空气浴反流方法的反流方法.微镜头阵列是微镜头阵列.预曝光技术 预曝光技术

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Atomic Force Microscopy01:08

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...