摄影探测器集成波导和半导体材料
Xin-Xue Wang1, Guang Zeng1, Qiu-Jun Yu1
1State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, China. honglianglu@fudan.edu.cn.
Nanoscale
|February 27, 2024
概括
高性能光电探测器将波导与半导体材料集成,为光学应用提供增强的光敏度. 本综述涵盖了先进光子集成电路的波导类型,材料和波长范围.
科学领域:
- 光电学是指光电子产品.
- 材料科学 材料科学 材料科学
- 光子学 是一个光子学.
背景情况:
- 光探测器对于光通信,传感和计算至关重要.
- 集成基板和半导体面临的挑战是光与敏感材料的相互作用.
- 波导,如 (Si) 和化 (Si3N4),提供独特的光学特性,以提高光探测器的性能.
研究的目的:
- 审查最近在光探测器中取得的进展,这些光探测器集成波导.
- 探索用于光探测器制造的常见波导类型和半导体材料.
- 检查各种波长 (UV至IR) 的波导集成光探测器.
主要方法:
- 波导类型的审查:Si,Si3N4,化,有机波导,石墨烯和MoTe2.
- 根据波长 (紫外线,可见光,红外线) 的灵敏度对光检测器的分类.
- 对波导和半导体材料的异质集成技术的分析.
主要成果:
- 波导增强光合和光探测器中的灵敏度.
- 混合光探测器显示了广泛波长覆盖的潜力.
- 常见的材料包括Si,Si3N4,GaN,有机材料,石墨烯和MoTe2.2.
结论:
- 将波导与半导体材料集成是高性能光电探测器的一个有希望的策略.
- 这些混合设备使多功能光子集成芯片和电路成为可能.
- 进一步的研究可以为各种光学应用优化这些设备.
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