在超流体He-4温度下进行冷实验的烯结合微流体通道
Š Midlik1, I Gablech2, M Goleňa1
1Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic.
The Review of scientific instruments
|March 1, 2024
概括
我们开发了一种新的芯片结合技术,用于超流体-4 (4He) 流体实验. 这种Parylen-C粘合方法在1.6K时是密封的,比其他方法更简单.
科学领域:
- 低温生化技术 低温生化技术
- 微流体学 微流体学
- 量子流体 量子流体
背景情况:
- 超流体-4 (4He) 研究需要专门的微流体设备.
- 传统的芯片粘合方法可能很复杂,不适合冷应用.
研究的目的:
- 为微流体流通道展示一种新的芯片对芯片粘合技术.
- 为了证明Parylen-C结合对超流体4He的适用性,在低温温度下进行实验.
- 评估集成加热器对超流体流动的影响.
主要方法:
- 在单晶中制造一个微流体通道 (24.5 × 100 μm2),配备一个集成的加热器.
- 在和Pyrex玻璃之间使用薄薄的Parylene-C层进行芯片对芯片的粘合.
- 在大约1.6K时,用超流体4He.He测试泄漏密度.
- 进行流体实验,并没有激活芯片上的加热器.
主要成果:
- 帕利-C粘合方法证明了超流体4He在1.6K的密封性.
- 粘合过程是一种更简单的替代方法,比如阳极粘合.
- 激活芯片上的白金加热器局部过热了通道,影响了超流体流速.
结论:
- 烯-C芯片对芯片的粘合是一种可行的,更简单的技术,用于制造用于超流体4He的低温微流体设备.
- 集成加热器允许局部控制温度,影响微通道内的超流体动力学.
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