MFIS

Jianxing Yang1, Yufang Xie1, Chengyan Zhu1

  • 1School of Physics and Electronic Engineering, Jiangsu University, Zhenjiang 2015, 27, 18112013, People's Republic of China.

Nanotechnology
|March 2, 2024
PubMed
概括

这项研究通过设计氧气空缺来增强基于哈夫尼亚 (HfO2) 的铁电薄膜,提高非易失性记忆的性能和耐久性. 该方法使用Al2O3中间层和Al剂来改善铁电特性.