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Updated: Jul 1, 2025

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一种用于原子探头断层扫描的自动化特定地点的尖端准备方法,使用脚本控制的聚焦离子束/扫描电子显微镜.

Jun Uzuhashi1, Tadakatsu Ohkubo1, Kazuhiro Hono1

  • 1Research Center for Magnetic and Spintronic Materials, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|March 5, 2024
PubMed
概括

使用聚焦离子束 (FIB) 和扫描电子显微镜 (SEM) 进行原子探头断层扫描 (APT) 的自动化特定地点的尖端准备,提高了材料研究的吞吐量和可靠性.

关键词:
APT:原子探头断层扫描 (APT):原子探头断层扫描.FIB:聚焦的离子束.SEM:扫描电子显微镜的扫描电子显微镜.自动化自动化自动化自动化

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