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单晶二维德瓦尔斯材料的晶圆尺度增长

Chetna Gautam¹, Baishali Thakurta², Monalisa Pal²

¹Department of Physics, Institute of Science, Banaras Hindu University, Varanasi, UP - 221005, India. akghosh@bhu.ac.in.

|March 6, 2024

概括

合成晶圆尺度单晶2D范德瓦尔斯 (vdW) 薄膜,如石墨烯和hBN,对于先进的电子技术至关重要. 本综述详细介绍了实现这些高度统一的大片面积的五个关键策略.

科学领域:

材料科学材料科学材料科学
凝聚物质物理学凝聚物质物理学
纳米技术纳米技术

背景情况:

二维 (2D) 范德瓦尔斯 (vdW) 材料,包括石墨烯,六边形化 (hBN) 和金属二化 (MCs),具有独特的电子,化学和机械性能,对于下一代电子和光电子是必不可少的.
这些2D材料在设备中的实际应用目前受到晶圆尺度,单晶,原子薄和高度均薄膜的缺乏限制.

研究的目的:

为合成晶圆尺度单晶2D vdW薄膜提供当前策略的全面概述.
突出最近在晶圆尺度上合成石墨烯,hBN和MC 2D薄膜方面的进展.

主要方法:

对晶圆尺度单晶2D vdW薄膜的五种不同的合成路径的审查.
详细讨论核化控制的生长,表轴对齐和凝聚,金属上的自我聚合,表面扩散和自我平面化以及种子介导的2D垂直表层.

主要成果:

识别和解释五种主要方法,使单晶2D vdW薄膜的合成成为可能.
证明在实现高质量,大面积的石墨烯,hBN和MCs单晶薄膜方面取得了重大进展.

结论:

晶圆尺度单晶2D vdW片的合成正在通过各种创新策略迅速推进.
解决这些合成方法的剩余挑战对于在先进设备中充分实现大规模的实际应用至关重要.

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