发射器形状对原子探头断层扫描视野的影响
Masoud Dialameh1, Yu-Ting Ling2, Janusz Bogdanowicz1
1Imec, Kapeldreef 75, 3001 Leuven, Belgium.
概括
原子探头断层扫描 (APT) 分析可能因样本形状而扭曲. 这项研究表明,不对称的发射器形状如何影响3D元素映射中的视野 (FOV) 和空间精度.
科学领域:
- 材料科学 材料科学 材料科学
- 分析化学 分析化学
- 物理 物理学 物理
背景情况:
- 原子探头断层扫描 (APT) 提供高分辨率的3D元素映射.
- 与理想半球的样本形状偏差可以在APT重建中引起文物.
- 发射器形状演变对APT视野 (FOV) 的影响尚不清楚.
研究的目的:
- 调查APT中的不对称发射器的视野 (FOV).
- 通过深度分析分析FOV的演变.
- 了解发射器形状如何影响APT的空间精度.
主要方法:
- 离子轨迹的数值模拟.
- 对不对称标本的实验APT分析.
- 对视野 (FOV) 位置和演变的分析.
主要成果:
- 来自不对称发射器顶部的离子向探测器中心投射.
- FOV中心可以偏离样本的中心轴.
- 在分析过程中,FOV位置随着发射器形状的变化而演变.
结论:
- 标本形状对于准确的APT重建至关重要.
- 考虑到发射器形状的演变对于先进的重建算法至关重要.
- 更好地了解FOV动态可以提高APT数据的空间准确性.
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