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Updated: Jul 1, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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射线计算机断层扫描仪表性能评估,第三部分:对不同放大度的探测器几何和旋转阶段错误的灵敏度

Prashanth Jaganmohan1,2, Bala Muralikrishnan1, Meghan Shilling1

  • 1Sensor Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

Journal of research of the National Institute of Standards and Technology
|March 12, 2024
PubMed
概括

这项研究调查了X射线计算机断层扫描 (XCT) 系统中的几何错误,重点关注探测器和旋转阶段的定位,以提高放大和错误灵敏度. 最佳的位置可以提高工业计量学的性能评估.

关键词:
电脑断层扫描X射线扫描圆光束 圆光束 圆光束距离错误 距离错误 距离错误 距离错误文档标准 文档标准 文档标准 文档标准形式错误 形式错误 是一个错误.几何学错误可能是几何学错误绩效评价 绩效评价 绩效评价 绩效评价 绩效评价基于X射线图的方法.灵敏度分析是一种敏感度分析.单点光线追踪方法的方法.

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