,

Yiwen Zhang1, Baoming Wang2, Changxu Miao3

  • 1Department of Materials Science and Engineering, Southern University of Science and Technology, 518055, Shenzhen, Guangdong, China.

Nature communications
|March 13, 2024
PubMed
概括

研究人员展示了一种创新的方法,可以在 (Si) 基板上的 (Ge) 表轴层内创建自组装的,封闭的腔. 这种技术允许精确控制腔体大小和位置,为新的半导体设备功能铺平了道路.

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