用石英晶体微平衡测量到SI的连接质量
C Stambaugh1, H Shakeel2, M Litorja1
1National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.
概括
这项研究将石英晶体微平衡 (QCM) 测量与使用重力测量分析的国际单位系统 (SI) 联系起来. 基于能源的方法为QCM应用提供了最准确的质量转换.
科学领域:
- 材料科学 材料科学 材料科学
- 计量学 计量学 计量学
- 物理 物理学 物理
背景情况:
- 石英晶体微平衡器 (QCM) 广泛用于薄膜质量测量.
- 目前的QCM方法缺乏与国际单位系统 (SI) 的直接联系.
- 现有的QCM测量信心依赖于广泛的历史研究.
研究的目的:
- 为了建立一个直接的SI可追溯性QCM质量测量.
- 为了比较用于将频率转移转换为质量的不同分析方法.
- 为了评估与真空环境过渡相关的质量变化.
主要方法:
- 使用定制真空金属沉积系统来沉积黄金薄膜.
- 在重力测量质量测量之前和之后用于SI连接校准.
- 在沉积过程中实时监测共振频率变化.
- 与频率,时间和基于能量的转换方法比较的重力测量质量.
主要成果:
- 基于能量的方法在频率转换为质量方面表现出卓越的精度 (0.36%至>1mg).
- 超过2%的偏差仅在100μg以下的质量变化中观察到.
- 在真空加载/卸载过程中量化可逆和不可逆的质量变化.
结论:
- 基于能量的方法提供了使用QCM最准确和可靠的SI可追溯质量确定.
- 这项工作为QCM测量建立了一个强大的校准框架.
- 这些发现对于工业和学术应用至关重要,这些应用需要精确的薄膜质量量定量.
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