,

Pan Qian1,2, Zongze Yu1,2, Jie Yu1,2

  • 1The State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100190 China.

PubMed
概括

一种新的复合机制增强了共振压力微传感器,用于准确的高压测量. 双共振器和差频输出可实现精确的自补偿读数,提供稳定的解决方案.