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Updated: Jun 30, 2025

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Published on: June 18, 2020

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一个 toroidal SAW 陀螺仪,带有聚焦的 IDT,用于提高灵敏度

Lu Tian1, Haitao Zhao1, Qiang Shen1

  • 1Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace, School of Mechanical Engineering, Northwestern Polytechnical University, Xi'an, 710072 China.

Microsystems & nanoengineering
|March 18, 2024
PubMed
概括

这项研究引入了一种新的 toroidal 站立波模式表面声波 (SAW) 陀螺仪,使用焦点交数字传感器 (FIDTs). 这种创新的设计显著提高了角度速度测量灵敏度和偏差不稳定性,适用于恶劣的环境.

关键词:
在NEMS中,NEMS是NEMS.传感器 传感器 传感器

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