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Updated: Jun 30, 2025

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
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同反应剂对表面氧化作用的作用 氧化物的原子层沉积在金属表面上的作用

Jay V Swarup1, Heng-Ray Chuang1, Amy L You1

  • 1RFS School of Chemical and Biomolecular Engineering Cornell University Ithaca, New York 14850, United States.

ACS applied materials & interfaces
|March 20, 2024
PubMed
概括

在氧化 (Al2O3) 的原子层沉积 (ALD) 中选择的共同反应剂显著影响膜生长和基板相互作用. 特-布坦醇 (t-BuOH) 在沉积Al2O3在敏感金属表面方面比水 (H2O) 有优势.

关键词:
原子层沉积 (ALD) 是指原子层的沉积.表面间的氧化过程.三甲基-布托西物种.

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