GeSe 电磁值开关:功能层厚度和设备尺寸的影响
Jiayi Zhao1,2, Zihao Zhao1,2, Zhitang Song1
1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China.
Scientific reports
|March 21, 2024
概括
为3D相位变换存储器 (3D PCM) 微型化GeSe Ovonic值开关 (OTS) 选择器显示值电压尺度与厚度,但不是设备大小. 电场触发了切换,对于可扩展的内存至关重要.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 半导体物理 半导体物理
背景情况:
- 三维相位变换内存 (3D PCM) 商业化用于存储类内存,利用欧文值开关 (OTS) 设备来减轻泄漏电流.
- 像GeSe,GeTe和GeS这样的基化物玻璃构成了OTS材料的基础,GeSe被广泛用于商业3DPCM.
- 基于GeSe的OTS材料的可扩展性,特别是关于设备小型化,需要进行彻底的调查.
研究的目的:
- 探索GeSe OTS选择器的小型化,重点关注功能层厚度和设备大小的可扩展性.
- 了解设备缩放如何影响GeSe OTS设备的值切换特性.
- 确定控制GeSe OTS选择器值切换的基本机制和关键电场.
主要方法:
- 研究了GeSe OTS设备的功能层厚度可扩展性.
- 检查了GeSe OTS选择器的设备大小可扩展性.
- 系统地分析了Ge-Se,Ge-S和Ge-Te OTS设备的值切换场.
- 与OTS材料的光学带隙相关联所需的电场.
主要成果:
- GeSe OTS 设备的值开关电压随着功能层厚度的下降而几乎线性地降低.
- 设备尺寸对值开关电压的影响微不足道,这表明电场驱动的开关.
- 确定GeSe OTS选择器的值切换场大约为105V/μm,不依厚度或尺寸.
- 对于OTS设备 (Ge-S,Ge-Te) 的值切换场超过了75V/μm,明显高于传统的PCM材料.
- 在所需的电场和OTS材料的光学带隙之间观察到强烈的相关性.
结论:
- 根据功能层厚度,GeSe OTS选择器是可扩展的,切换行为受临界电场的控制.
- 值切换场是OTS设备优化的关键参数,受到光学带隙等材料特性的影响.
- 这些发现为优化基于GeSe的OTS设备提供了洞察力,并为OTS应用探索新的石化合金材料.
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