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Updated: May 12, 2026

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使用火花等离子烧结系统制造先进的半导体材料

Kamil Kaszyca1, Marcin Chmielewski1, Bartosz Bucholc1,2

  • 1Lukasiewicz Research Network, Institute of Microelectronics and Photonics, al. Lotnikow 32/46, 02-668 Warsaw, Poland.

Materials (Basel, Switzerland)
|March 28, 2024
PubMed
概括

发光等离子烧结 (SPS) 能够实现先进的材料加工. 本研究详细介绍了一种用于合成半导体的SPS设备,以提高科学和工业用途的工艺控制和精度.

关键词:
这就是SHSHS.这些是SPSS.电弧融的炼方式毕斯穆特化物化物.的三胺化物.一半的豪斯勒.半导体材料的半导体材料是什么在火花等离子烧结过程中,火花等离子烧结.

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Inductively coupled plasma (ICP) is the most widely used plasma source in atomic emission spectroscopy (AES), also known as Inductively Coupled Plasma Optical Emission Spectroscopy (ICP-OES). The ICP source, or torch, consists of three concentric quartz tubes with argon gas flowing through them. A spark from a Tesla coil initiates the ionization of argon, generating a high-temperature plasma.
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...