:

Zhuoyue Zheng1, Chen Wang2, Linlin Wang2

  • 1Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China.

Micromachines
|March 28, 2024
PubMed
概括

本综述涵盖了微电机系统 (MEMS) 麦克风的进展,重点关注转导,机械结构和降噪,以实现高性能语音捕捉. 它解决了诸如残余压力和环境噪音等挑战,以改善动态范围.