基于温度补偿的高精度单端流微位移传感器.
Zhengping Xu1, Yongtong Feng1,2, Yi Liu1,2
1Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou 215163, China.
Micromachines
|March 28, 2024
概括
本研究介绍了一种温度补偿的旋流传感器,用于精确测量微位移. 开发的传感器实现了高分辨率,并大大减少了温度变化引起的电压波动.
科学领域:
- 仪器仪表和测量仪器的使用
- 传感器技术 传感器技术
- 材料科学 材料科学 材料科学
背景情况:
- 可靠的微位移测量需要高精度的传感器.
- 厄迪电流传感器提供无接触测量功能.
- 温度变化可以显著影响传感器的准确性.
研究的目的:
- 开发和评估一个具有集成温度补偿的单端旋流传感器.
- 在分辨率,可重复性和温度稳定性方面分析传感器的性能.
- 为了证明拟议的设计对于精确的微型移位应用的可行性.
主要方法:
- 详细研究流传感器原理和探头制造.
- 处理电路的设计,将输出信号变化转换为数字脉冲.
- 实现数字相区分器,低通波器和放大阶段.
- 使用数字电位计和嵌入式温度传感器开发温度补偿电路.
主要成果:
- 传感器在很大的测量范围内表现出非线性.
- 在500微米范围内达到46nm的分辨率,FR可重复性误差为±0.70%.
- 温度补偿将电压波动从+2°C到+58°C范围内从586mV降低到44mV.
结论:
- 开发的温度补偿旋流传感器可用于高精度的微位移测量.
- 传感器在不同温度条件下表现出更高的准确性和稳定性.
- 考虑测量范围,精度和目标材料对于实际实施至关重要.
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