相关实验视频
Updated: May 3, 2026

08:01
Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
12.3K
单立体集成三轴加速/压力/磁场传感器的制造和特性
Ying Wang1, Yu Xiao1, Xiaofeng Zhao1,2
1The Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, Harbin 150080, China.
Micromachines
|March 28, 2024
概括
这项研究引入了一种新的单立体集成传感器,能够测量三轴加速,压力和磁场. 该设备使用微电机系统 (MEMS) 制造,为多参数传感应用提供了多功能解决方案.
科学领域:
- * 传感器技术和MEMS (微电子机械系统)
背景情况:
- *现有的传感器系统通常需要多个离散组件来测量加速,压力和磁场.
- *单体集成为传感器件的小型化,复杂性降低和成本效益提供了潜力.
研究的目的:
- * 提出和描述一种单体集成传感器,用于同时测量三轴加速度,压力和磁场.
- * 分析集成传感器的设计,模拟,制造和性能.
主要方法:
- *使用COMSOL和TCAD-Atlas软件设计和模拟集成传感器.
- *使用微电机系统 (MEMS) 技术制造传感器.
- *使用内部粘合技术进行包装.
主要成果:
- * 在5V工作电压和室温下,实现了3.58mV/g (x轴),2.68mV/g (y轴) 和9.45mV/g (z轴) 的加速度灵敏度.
- * 证明压力灵敏度为0.28 mV/kPa,磁场灵敏度为22.44 mV/T.
- *通过模拟和表征成功测量了三轴加速度,压力和磁场,通过模拟和表征得到证实.
结论:
- * 拟议的单体集成传感器有效测量三轴加速度,压力和磁场.
- * 基于MEMS的传感器在多参数传感应用中表现出有希望的性能.
相关概念视频
Magnetic Damping
1.3K
Eddy currents can produce significant drag on motion, called magnetic damping. For instance, when a metallic pendulum bob swings between the poles of a strong magnet, significant drag acts on the bob as it enters and leaves the field, quickly damping the motion.
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
If, however, the bob is a slotted metal plate, the magnet produces a much smaller effect. When a slotted metal plate enters the field, an emf is induced by the change in flux; however, it is less effective because the slots limit the...
1.3K
Three-Dimensional Force System
3.2K
In mechanical engineering, a three-dimensional force system is a system of forces acting in three dimensions, with forces applied along the x, y, and z coordinate axes. The three-dimensional force system is an important concept in mechanical engineering, as it allows engineers to understand and analyze the behavior of objects and structures in three dimensions. By understanding the forces acting on a system, engineers can design more efficient and effective mechanical systems that can withstand...
3.2K
Pressure Gauges
5.3K
Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...
5.3K

