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Ying Wang1, Yu Xiao1, Xiaofeng Zhao1,2

  • 1The Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, Harbin 150080, China.

Micromachines
|March 28, 2024
PubMed
概括

这项研究引入了一种新的单立体集成传感器,能够测量三轴加速,压力和磁场. 该设备使用微电机系统 (MEMS) 制造,为多参数传感应用提供了多功能解决方案.

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