阶段变化材料的单立体后端整合到造厂制造的光子学中

Maoliang Wei1, Kai Xu1, Bo Tang2

  • 1The State Key Lab of Brain-Machine Intelligence, Key Laboratory of Micro-Nano Electronics and Smart System of Zhejiang Province, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, China.

Nature communications
|March 30, 2024
PubMed
概括

研究人员使用新的蚀刻停止层将新型相变材料集成到光子学中. 这使得紧的,零静电功率的光学调制器和减弱器成为可能,从而推进了异质的光子集成电路.