.

Kunmo Koo1, Joon Ha Chang1, Sanghyeon Ji1

  • 1Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea.

Nano letters
|April 1, 2024
PubMed
概括

由于独特的物理和化学约束,纳米级的湿蚀刻很困难. 这项研究揭示了压抑的反应和随机行为,提供了对半导体制造挑战的见解.