揭示了在纳米晶体TiN膜中的谷物边界快速化物离子扩散的起源

Yuji Kunisada1, Chiharu Kura2, Norihito Sakaguchi1

  • 1Center for Advanced Research of Energy and Materials, Faculty of Engineering, Hokkaido University, N13W8, Kita-ku, Sapporo 060-8628, Japan.

ACS omega
|April 1, 2024
PubMed
概括

纳米晶体化 (TiN) 膜有助于高效的生产. 颗粒边界空间允许化物离子扩散和选择性透,增强的透性.