PUB2对芯片铜连接电等级效应的影响:机制和应用
Lanfeng Guo1,2, Renlong Liu1, Zhaobo He2
1School of Chemistry and Chemical Engineering, Chongqing University, Chongqing 400044, China.
ACS omega
|April 1, 2024
概括
这项研究引入了含有多四级氨尿素的聚合物 (PUB2) 作为铜电解沉积的新增剂. PUB2通过降低表面波动性和提高穿孔填充率,显著改善了晶圆级包装.
科学领域:
- 材料科学 材料科学 材料科学
- 电化学 电化学 电化学
- 表面工程是什么?表面工程是什么?
背景情况:
- 铜连接对于先进的电子包装至关重要,如晶圆级包装 (WLP),包装中的系统 (SiP) 和3D包装.
- 硫酸铜电溶液中的有机添加剂对于控制铜电的规律性至关重要.
研究的目的:
- 为了研究铜电极沉积中含有多四级氨尿素聚合物 (PUB2) 的平衡效应和机制.
- 评估PUB2在调节芯片上连接的铜沉积率方面的性能.
主要方法:
- 电化学试验 电化学试验
- 在X射线衍射 (XRD) 中.
- 3D 造型分析 3D 造型分析
- 扫描电子显微镜 (SEM) 的使用
主要成果:
- 在使用常见的添加剂 (SPS,PEG) 时,PUB2表现出极好的极化能力和稳定性.
- 优化PUB2度减少了晶圆表面布线的波动度,从130nm降至70nm.
- 表面粗度从10nm降至7nm,穿孔填充率提高了57%.
结论:
- PUB2有效地平整铜表面,并调节电工艺中的沉积率.
- 该研究建立了一个新的研究方法,用于开发和应用新的电添加剂.
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