超高反射光学薄膜是通过反应磁铁子喷射与射频诱导的基板偏差制成的
Tung-Hsun Chung1,2,3, Xiao-Lu Zou1,2,3, Qi-Hang Zhang1,2
1Hefei National Research Center for Physical Sciences at the Microscale and School of Physical Sciences, University of Science and Technology of China, Hefei 230026, China.
The Review of scientific instruments
|April 2, 2024
概括
我们开发了一种新的反应磁铁子喷射技术,以创建高反射率 (HR) 的光学薄膜. 这种方法实现了对精确量子测量至关重要的超高反射性镜子.
科学领域:
- 材料科学 材料科学 材料科学
- 光学和光子学 在光学和光子学.
- 量子技术 量子技术 量子技术
背景情况:
- 高反射率 (HR) 光学薄膜是量子精度测量系统中的关键组件.
- 现有的制造方法在实现先进应用所需的反射率和层质量方面可能存在局限性.
研究的目的:
- 引入和验证一种新的涂层技术,用于制造先进的HR光学薄膜.
- 为了证明这种方法在生产超高反射率镜子中具有的能力,用于精确测量.
主要方法:
- 采用了带有无线电频率 (RF) 诱导的基板偏差的反应磁铁子喷射.
- 利用射频等离子辅助实现原子平的二氧化 (SiO2) 和氧化 (Ta2O5) 层.
- 制造了一个分布式布拉格反射器 (DBR) 镜子,具有特定的多层结构 (空气-H{LH}19-基板).
主要成果:
- 证明了高质量,原子平的SiO2和Ta2O5层的成功沉积.
- 在中心波长为1397nm时,达到约99.999328%的超高反射率 (HR).
- 制造的DBR镜子由交替的SiO2 (171.6nm) 和Ta2O5 (237.8nm) 层组成.
结论:
- 这种新型的RF诱导基质偏差喷雾技术对于生产优异的HR光学薄膜是有效的.
- 这种先进的涂层方法可以开发下一代HR反射器,用于要求高精度测量应用.
- 展示的超高反射率镜子在推进量子精度测量技术方面具有重大潜力.
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