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热电光导二极管用于高度灵敏和快速的DUV检测

Xiaohu Hou¹, Yan Liu¹, Shiyu Bai¹

¹School of Microelectronics, University of Science and Technology of China, Hefei, 230026, China.

Advanced materials (Deerfield Beach, Fla.)

|April 2, 2024

概括

这项研究引入了一种新型的热电光导二极管 (PPD),用于检测高能光子. 该设备为深紫外线和X射线检测提供超高灵敏度和速度,增强成像系统.

科学领域:

半导体物理半导体物理
光子检测技术的技术
材料科学是一种材料科学.

背景情况:

检测高能光子 (深紫外线到X射线) 在各种领域至关重要.
宽带隙 (WBG) 半导体对光子检测有希望,但在深层陷和设备工程方面面临挑战.
现有的WBG探测器往往难以实现高灵敏度和快速响应速度.

研究的目的:

提出和演示一种新型的热电光导二极管 (PPD),用于增强高能光子检测.
为了利用接口的热电效应与光导性相结合,在一个定制的半导体结构中.
克服现有探测器在灵敏度,速度和设备工程方面的局限性.

主要方法:

制造一个定制的多晶高丰富的GaOx (PGR-GaOx) 肖特基光二极管.
在PPD结构中,将火电效应与光导效应集成为接口.
对PPD设备在深紫外线 (DUV) 和X射线检测方面的性能进行表征.

主要成果:

该PPD设备实现了对DUV和X射线光的超高检测性能.
已证明对DUV光的响应度高达10^4 A W^-1和对X射线的敏感度高达10^5 μC Gy_air^-1 cm^-2.
接口的火电效应显著提高了设备的响应速度10^5倍.

结论:

开发的PPD为敏感和高速探测器提供了一种新的设计策略.
该研究强调了火电效应在推进探测器技术方面的潜力.
该设备在需要低功耗和高灵敏度的成像增强系统中的应用方面表现有前途.

关键词:

富含高的高氧高灵敏度的高灵敏度的高灵敏度高能光子检测检测高能光子检测热电光导二极管是一种光导二极管.

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