相关实验视频
Updated: May 31, 2026

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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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概括
使用贝齐尔自由形曲线的新设计方法使得超高Q微波共振器 (MRR) 成为可能. 这种方法显著降低了损失,实现了1.86 × 10^6.6的Q系数.
科学领域:
- 光子学和光学工程 光子学和光学工程
- 纳米技术和材料科学 材料科学
背景情况:
- 微环共振器 (MRR) 对集成光子学至关重要.
- 在MRR中实现超高质量 (Q) 因素对于先进的光学应用是必不可少的.
- 传统设计在减少传播和模式不匹配损失方面存在局限性.
研究的目的:
- 引入使用贝齐尔自由形曲线的超高QMRR的新设计方法.
- 为了证明自由形状曲线在减轻光学损失方面的有效性.
- 为了实现一个紧而灵活的MRR结构,具有很大的自由光谱范围 (FSR).
主要方法:
- 利用贝齐尔的自由形状曲线来设计一个180度波导曲线,具有梯度宽度和曲率.
- 包含一个定向合器和低损耗的多模式条形波导.
- 使用标准的造工艺制造了MRR.
主要成果:
- 实现了1.86 × 10^6.6的超高负载Q系数.
- 获得了大约1nm的自由光谱范围 (FSR).
- 证明了传播损失和模式不匹配损失的显著减少.
结论:
- 贝齐尔自由形曲线为光学波导提供了增强的设计自由.
- 拟议的设计方法有效地抑制了MRR中的光学损失.
- 开发的MRR表现出卓越的性能指标,为先进的光子集成电路铺平了道路.
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