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偏差校正用于大角度照明扫描传输电子显微镜,使用代电子图形算法算法

Yinhang Ma¹, Jinan Shi¹, Roger Guzman¹

¹School of Physical Sciences and CAS Key Laboratory of Vacuum Physics, University of Chinese Academy of Sciences, Beijing 100190, China.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada

|April 5, 2024

概括

电子图形学克服了扫描传输电子显微镜 (STEM) 中的偏差校正极限,用于大角度照明. 这种技术在低电压下实现超高分辨率成像,增强了原子尺度分析.

科学领域:

材料科学材料科学材料科学
物理物理学物理
电子显微镜电子显微镜

背景情况:

扫描传输电子显微镜 (STEM) 中的现代偏差校正器增强了空间分辨率,并使低电压的原子尺度分析成为可能.
对大角度照明的偏差校正具有挑战性,限制了超分辨率,3D原子深度和表面形态分析的进步.

研究的目的:

通过使用电子图形学来证明STEM中大角度照明的偏差校正的可行性.
为了克服当前在高级显微镜应用中高角度偏差校正方面的技术局限性.

主要方法:

使用电子图形学与四维STEM数据采集.
采用规范化的图形图形代引擎算法来重建4D数据集.
使用补充金属氧化物半导体摄像机获得的数据,效率相对较低.

主要成果:

为大角度照明 (50-60mrad) 取得了成功的偏差校正.
证明了超高分辨率的成像,分辨率为0.71 Å.
在60kV的低加速电压下运行.

结论:

电子图解提供了一种可行的后处理策略,以超越STEM偏差校正的局限性.
这种方法可实现高分辨率的原子尺度成像,在降低加速电压下采用大角度照明.

关键词:

4D-STEM是一个4D-STEM.偏差纠正偏差纠正电子图形学 (electron ptychography) 是一种电子图形学.大角度照明照明阶段图像阶段图像阶段图像图形图形的代引擎是一个代引擎.超级解决方案的超级解决方案

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