根据单晶金刚石丝的表面粗度,预测地表微裂损伤深度
Keying Wang1, Yufei Gao1,2, Chunfeng Yang1
1Key Laboratory of High Efficiency and Clean Mechanical Manufacture of MOE, School of Mechanical Engineering, Shandong University, Jinan 250061, China.
Materials (Basel, Switzerland)
|April 9, 2024
概括
这项研究开发了一种模型,用于预测钻石丝切割后在单晶 (单Si) 晶片中的地下微裂纹损伤深度 (SSD). 更大的表面粗度 (SR) 与更深的SSD相关,使得非破坏性损坏评估成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 制造业 工程 制造工程
- 表面计量学 表面计量学
背景情况:
- 钻石丝切割单晶 (mono-Si) 可以诱导地下微裂纹损伤 (SSD),影响晶圆的机械性能和随后的加工.
- 对SSD进行准确,非破坏性评估对于晶片制造中的质量控制至关重要.
- 现有的模型可能无法完全解释影响裂传播的切削力和应力场的复杂相互作用.
研究的目的:
- 开发一个预测模型的地下微裂纹损伤深度 (SSD) 在钻石丝的单晶 (mono-Si).
- 为了建立和完善作为的表面粗度 (SR) 和SSD之间的关系.
- 为优化钻石丝工艺提供理论和实验基础.
主要方法:
- 通过考虑接触力,弹性应力场和残余应力场,研究了SSD和表面粗度 (SR) 之间的关系.
- 通过在单Si (111) 平面上的实验验验证的柔性模式移除系数,改进了理论SR-SSD模型.
- 分析了线程速度和料速度对SR和SSD的影响.
主要成果:
- 在晶片SSD和SR之间建立了一个非线性,不断增长的关系:SSD=21.179 Ra^{4/3).
- 发现线程速度降低和料速度增加导致SR和SSD的增加.
- 证明更大的SR值与更深的SSD相关,并减少理论预测和实验测量之间的相对误差.
结论:
- 基于SR开发的SSD预测模型提供了一种准确而非破坏性的方法,用于评估晶片的地下损伤.
- 这些发现为优化钻石丝参数提供了宝贵的见解,以最大限度地减少微裂纹损伤.
- 这项研究支持在单晶晶片生产中提高质量控制和工艺效率.
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