10纳米铁电Al0.7Sc0.3N基电容器的演示,用于启用无选择器内存阵列
Li Chen1, Chen Liu1, Hock Koon Lee1
1Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore.
Materials (Basel, Switzerland)
|April 9, 2024
概括
添加的化 (AlScN) 电容器显示出对无选择器内存阵列的承诺. 这些10纳米设备提供高性能,低功耗和稳定的多态内存,可实现高密度应用.
科学领域:
- 材料科学 材料科学 材料科学
- 电气工程 电气工程
- 固态物理 固态物理
背景情况:
- 铁电材料对于非挥发性内存应用至关重要.
- 开发高性能,低功耗的内存设备对于现代电子设备至关重要.
- 酸化 (AlScN) 是一种新兴材料,具有有前途的铁电性质.
研究的目的:
- 为了证明10纳米AlScN电容器用于无选择器内存阵列的可行性.
- 描述AlScN电容器的铁电特性和设备性能.
- 评估AlScN在高密度内存应用中的潜力.
主要方法:
- 在8英寸的晶片上沉积10纳米AlScN薄膜,使用喷雾技术.
- 制造尺寸小于1.5微米的侧向电容器.
- 使用正上负下 (PUND) 方法对铁电特性进行表征.
- 评估内存窗口,功耗,干扰率和多状态特征.
主要成果:
- AlScN薄膜呈现出很大的残余极化 (>100μC/cm2) 和紧密的强制场分布.
- 设备显示内存窗口超过250%的低功耗 (~40 pJ).
- 实现了低干扰率 (<2%) 和稳定的多态记忆特征.
- 制造过程与后端线路 (BEOL) 集成兼容.
结论:
- 10nm AlScN电容器适用于无选择器的内存阵列应用.
- 展示的设备性能突出显示了高密度内存解决方案的潜力.
- 基于AlScN的铁电容器为下一代内存技术提供了一个有前途的途径.
相关概念视频
MOS Capacitor
772
A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
The metal gate is typically made from highly conductive materials such as aluminum or polysilicon. Beneath the metal gate lies a thin layer of...
772
Dielectric Polarization in a Capacitor
4.7K
The presence of a dielectric medium in a capacitor not only changes the voltage and capacitance but also affects the electric field. In general, dielectrics can be of two types: polar and nonpolar. In a polar dielectric, the positive and negative charges in the molecules are separated by a distance and hence have a permanent dipole moment. In contrast, no such charge separation exists in a nonpolar dielectric, however the nonpolar molecules get polarized in the presence of an external electric...
4.7K
Spherical and Cylindrical Capacitor
5.7K
A spherical capacitor consists of two concentric conducting spherical shells of radii R1 (inner shell) and R2 (outer shell). The shells have equal and opposite charges of +Q and −Q, respectively. For an isolated conducting spherical capacitor, the radius of the outer shell can be considered to be infinite.
Conventionally, considering the symmetry, the electric field between the concentric shells of a spherical capacitor is directed radially outward. The magnitude of the field,...
Conventionally, considering the symmetry, the electric field between the concentric shells of a spherical capacitor is directed radially outward. The magnitude of the field,...
5.7K
Equivalent Capacitance
334
From the study of resistive circuits, it is understood that employing a series-parallel combination serves as an effective strategy for simplifying circuits. Capacitors can be arranged within a circuit in one of two ways: a series configuration or a parallel configuration. The way these capacitors are connected to a battery will influence both the potential drop across each individual capacitor and the size of the charge that each capacitor can store. This is determined by the specific type of...
334
Capacitor With A Dielectric
3.9K
Parallel plate capacitors consist of two conducting plates separated by a certain distance. However, it is mechanically difficult to hold the large plates parallel to each other without actual contact. Hence, a dielectric layer is commonly placed between the plates, which provides an easy solution for holding the plates together with a small gap and increases the capacitance of the capacitor.
Dielectrics are non-conducting materials with no free or loosely bound electrons. When a dielectric is...
Dielectrics are non-conducting materials with no free or loosely bound electrons. When a dielectric is...
3.9K
Capacitors
431
Capacitors play a crucial role in car radios, where they filter and store frequencies to ensure clear signal reception. Essentially serving as energy storage devices, capacitors store energy within their electric field and are composed of two parallel conducting plates separated by a dielectric.
When a voltage source is connected to a capacitor, positive and negative charges accumulate on the opposite plates. This accumulation generates a potential difference that equals the product of the...
When a voltage source is connected to a capacitor, positive and negative charges accumulate on the opposite plates. This accumulation generates a potential difference that equals the product of the...
431


