透明的导电性和共氧化膜
Iqra Ramzan1, Joanna Borowiec1, Ivan P Parkin1
1Materials Chemistry Centre, Department of Chemistry, University College London, London, WC1H 0AJ, UK.
ChemPlusChem
|April 9, 2024
概括
使用气溶辅助化学蒸气沉积 (AACVD) 开发了高度透明和导电的氧化 (ZnO) 薄膜. 和的联合注显著提高了透明导电氧化物应用的薄膜形态和电气性能.
科学领域:
- 材料科学 材料科学 材料科学
- 固态物理 固态物理
背景情况:
- 透明导电氧化物 (TCO) 对光电子设备至关重要.
- 开发具有改进性质的高效TCO仍然是一个活跃的研究领域.
研究的目的:
- 为了研究ZnO薄膜与和联合的作用.
- 为了优化透明导电氧化物应用的薄膜特性.
主要方法:
- 使用气溶辅助化学蒸汽沉积 (AACVD) 在450°C下沉积薄膜.
- 描述包括XPS,XRD,UV-Vis光谱,SEM和四点探针测量.
主要成果:
- 沉积的薄膜呈现出高透明度 (80-87%) 和结晶性.
- 配膜 (0.70在%Ti,1在%F) 显示了增强的特性:移动性 (8.4厘米2V-1s-1),载体度 (3.97×1020厘米-3),电阻力 (1.69×10−3 Ω厘米) 和3.6 eV的带间隙.
- 协同使用导致了更同质的薄膜形态,具有明确的粒度.
结论:
- 和联合化是一种有效的策略,可以增强ZnO薄膜特性.
- 开发的配ZnO薄膜对透明导电氧化物应用具有前景.
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