尺寸对粘性驱动微光束的热噪声和声响的影响
Junpeng Lai1, Mahdi Farahikia2, Morteza Karimi1
1Department of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.
The Journal of the Acoustical Society of America
|April 10, 2024
概括
这项研究引入了新的麦克风,能够感知流体的运动,而不是压力. 这些微尺度设备显示热力学噪声与尺寸无关,与传统麦克风不同.
科学领域:
- 声学 声学 在声学方面
- 微电子机械系统 (MEMS) 是一种微电子机械系统.
- 流体动力学 流体动力学
背景情况:
- 传统的麦克风依赖于声压进行操作.
- 现有的设计具有与压力传感相关的尺寸和噪声底限的限制.
- 由粘性力驱动的麦克风提供了一个潜在的替代方案.
研究的目的:
- 为了研究由粘性空气力量驱动的微型悬臂梁的热力学噪声和声学反应.
- 为了比较流体运动传感麦克风与传统压力传感设计的性能.
- 探索传感器尺寸对噪声性能的影响.
主要方法:
- 理论分析和模拟微尺度横向梁的理论分析.
- 建模粘性力与光束和空气之间的相对速度成比例.
- 测量压力参考热噪声的测量.
主要成果:
- 热力学噪声显示出对光束宽度和长度的弱依赖.
- 传感器尺寸不会显著影响这些新型麦克风的性能.
- 计算的噪声水平与实验测量结果一致.
结论:
- 传感流体运动的麦克风可以实现降低传感元件大小.
- 独立于尺寸的噪声特征是压力式麦克风的关键优势.
- 这项技术为小型声学传感器提供了一个有前途的途径.
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