在-纳米晶体薄膜中测试残余应力分布的组成依赖性
Rahulkumar Jagdishbhai Sinojiya1, Priya Paulachan1, Fereshteh Falah Chamasemani1
1Materials Center Leoben Forschung GmbH, A-8700 Leoben, Austria.
概括
将少量添加到膜中可以显著降低内部应力,提高其稳定性和抗缺陷性. 这项研究有助于设计更强,更耐用的纳米晶合金薄膜.
科学领域:
- 材料科学 材料科学 材料科学
- 薄膜技术 薄膜技术
- 纳米技术纳米技术
背景情况:
- 纳米晶合金薄膜具有理想的性能,如高硬度和耐磨性.
- 这些薄膜的制造往往导致高余应力,导致缺陷和降低稳定性.
研究的目的:
- 研究少数元素 () 度对-薄膜中的残余应力的影响.
- 了解如何影响这些薄膜的机械性能和缺陷形成.
主要方法:
- 使用微杆样本对局部残余应力的实验测量.
- 机器学习用于压力预测和数据提取.
- 原子模型,微观结构和元素分析以求相关性.
主要成果:
- 发现缩显著改变了纳米晶体薄膜中储存的残余应力.
- 在的度,微观结构和应力水平之间建立了明确的相关性.
结论:
- 少数元素度是控制纳米晶膜中的残余应力的一个关键因素.
- 研究结果为设计各种应用中更稳定,更可靠的-薄膜提供了洞察力.
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