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基于芯片上的宽带,紧型TM模式的Mach-Zehnder光学隔离器基于InP-on-Insulator平台

Wan-Ting Chen^1,2, Li Liu¹, Jia Zhao^1,2

¹School of Information Science and Engineering, Shandong University, Qingdao 266237, China.

Nanomaterials (Basel, Switzerland)

|April 26, 2024

概括

我们开发了一种用于光子集成电路的新型InP-on-insulator光学隔离器. 这款紧型设备提供宽带性能,克服了与主动设备的集成挑战.

科学领域:

光子学和材料科学材料科学
集成光学集成光学集成光学
半导体设备半导体设备

背景情况:

集成光学隔离器对于光子集成电路 (PIC) 是必不可少的.
目前基于在绝缘体 (SOI) 的绝缘体面临与活性组件的集成限制.
需要先进的平台来提高隔离器的功能和兼容性.

研究的目的:

提出和设计一种新的宽带,紧的TM模式马赫-泽恩德光学隔离器.
探索InP-on-insulator平台,以实现增强的设备集成.
研究磁光波导结构的不同粘合技术.

主要方法:

使用InP-on-insulator设计了两个磁光波导结构.
采用O2等离子体表面激活直接晶圆粘合和DVS-基 (BCB) 粘合,用于Ce:YIG和InP集成.
进行了详细的计算和优化,以最大限度地实现非互惠相位移 (NRPS).

主要成果:

在1550nm的72nm的30dB带宽实现了直接结合的波导结构.
证明了0.256微米的设备长度差异.
分析了波导臂长度,制造精度和维度错误对性能的影响.

结论:

拟议的InP-on-insulator马赫-泽恩德光学隔离器为宽带,紧的PIC提供了一个可行的解决方案.
直接晶圆粘合和BCB粘合剂粘合在设备制造中具有明显的优势.
计算的制造公差为设备实现提供了实际指导.

关键词:

在P-on绝缘器上使用InP.马克·泽恩德干扰仪的干扰仪.这是磁光学光学.非互惠的相位转移.这是一个光学隔离器.

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