准一维性质对垂直纳米线场效应晶体管 (VNWFET) 中的源/排水接触的影响
Iksoo Park1, Jaeyong Choi1, Jungsik Kim2
1Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
Micromachines
|April 27, 2024
概括
准-1D纳米线场效应晶体管显示出更高的辐射接触电阻比轴向接触电阻由于量子封闭效应. 这会影响设备的性能,特别是30nm以下的纳米线.
科学领域:
- 材料科学 材料科学 材料科学
- 凝聚物质物理学 凝聚物质物理学
- 纳米技术 纳米技术
背景情况:
- 垂直纳米线 (NW) 场效应晶体管 (FET) 对于下一代电子产品至关重要.
- 了解接触电阻对于优化NW FET性能至关重要.
- 几乎一维 (quasi-1D) 特性显著影响电荷传输.
研究的目的:
- 研究准-1D特性对垂直NWFET的源和排水接触电阻的影响.
- 分析轴向和辐射接触电阻的不同行为.
- 确定NW直径和接触几何形状对电阻的影响.
主要方法:
- 在北北方的电子传输机制的数值分析.
- 模拟量子束对辐射和轴向运输的影响.
- 模拟接触电阻变化与NW直径和重叠长度.
主要成果:
- 准-1D NW 呈现出不同的电子道通道:离散的能量水平辐射和连续的能量水平轴向.
- 直径小于30nm的NW显示与轴接触阻相比,辐射接触阻明显更高.
- 随着重叠长度 (<5 nm) 的增加,观察到辐射电阻的适度降低,但它仍然高于轴电阻.
结论:
- 量子限制在准-1D NW 强烈影响辐射传输和接触电阻.
- 运输机制的差异导致了较小直径NWs的更高的辐射接触电阻.
- 接触设计和NW尺寸是管理垂直NWFET电阻的关键因素.
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