2D材料的计量学:从设备和系统的国际路线图的视角回顾
Umberto Celano1, Daniel Schmidt2, Carlos Beitia3
1School of Electrical, Computer and Energy Engineering, Arizona State University Tempe AZ 85287 USA umberto.celano@asu.edu.
Nanoscale advances
|May 2, 2024
概括
国际设备和系统路线图 (IRDS) 预测了芯片制造中的二维材料. 本次审查强调了需要先进的表征技术来满足制造业的需求.
科学领域:
- 材料科学 材料科学 材料科学
- 半导体制造业 半导体制造业
- 计量学 计量学 计量学
背景情况:
- 预计在未来十年内,二维材料将用于超大规模,低功耗设备的大量制造.
- 在先进的芯片制造中广泛采用正在发展,需要不同的表征方法.
研究的目的:
- 审查当前对2D材料的测量能力.
- 为了确定CMOS兼容的二维材料所必需的计量学的差距.
- 探索大批量半导体制造中的基本测量科学局限性.
主要方法:
- 对当前测量能力的文献综述.
- 对半导体制造中的二维材料的计量学差距的分析.
- 测量科学局限性的探索.
主要成果:
- 对于二维材料,从实验室到工厂的过渡正在芽.
- 目前还没有普遍的计量学解决方案.
- 快速的社区进步表明了重大进步的潜力.
结论:
- 多样性表征对于控制和优化大规模生产设备中的2D材料至关重要.
- 解决计量学缺口和测量科学局限性对于成功将二维材料集成到大批量制造中至关重要.
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