与P型单层WSe2的低电阻接触
Jingxu Xie1,2,3, Zuocheng Zhang1, Haodong Zhang1
1Department of Physics, University of California at Berkeley, Berkeley, California 94720, United States.
Nano letters
|May 7, 2024
概括
研究人员使用WSe2/α-RuCl3异构开发了一种新的兴奋剂策略,以显著降低二维 (2D) 半导体晶体管中的接触电阻. 这一突破使得高性能p型单层WSe2场效应晶体管 (FET) 成为可能.
科学领域:
- 材料科学 材料科学 材料科学
- 凝聚物质物理学 凝聚物质物理学
- 纳米技术 纳米技术
背景情况:
- 先进的微电子需要超越的新型半导体通道材料.
- 由于其原子薄度,二维 (2D) 半导体为未来的电子设备提供了潜在的潜力.
- 金属半导体接口的高接触电阻限制了二维半导体场效应晶体管 (FET) 的性能.
研究的目的:
- 开发一种电荷转移兴奋剂策略,以在p型单层WSe2晶体管中实现低电阻欧姆接触.
- 研究WSe2/α-RuCl3异构结构用于减少接触电阻的使用.
- 为了展示使用开发的接触策略的高性能p型WSe2晶体管.
主要方法:
- 制造WSe2/α-RuCl3的异构结构.
- 使用III型带对齐用于电荷转移兴奋剂.
- 电气特征 WSe 2 晶体管,以确定接触电阻,电流和 I ON / I OFF 的比率.
主要成果:
- 在WSe2/α-RuCl3异构结构中达到高孔兴奋剂度,高达3×1013cm-2.
- 证明了欧姆接触,低电阻为4kΩμm.
- 制造的p型WSe2晶体管在室温下表现出电流为35μA·μm-1和ION/IOFF比率超过109的电流.
结论:
- 使用WSe2/α-RuCl3异构的电荷转移兴奋剂策略有效地降低了2D晶体管中的接触电阻.
- 这种方法可以制造高性能p型单层WSe2FET.
- 这些发现为基于2D半导体的先进电子设备铺平了道路.
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