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Updated: Jun 27, 2025

Lensfree On-chip Tomographic Microscopy Employing Multi-angle Illumination and Pixel Super-resolution
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无镜头反射拓,用于高分辨率晶圆检查

Hojun Lee1, Jangwoon Sung2, Seungbeom Park2

  • 1Mechatronics Research, Samsung Electronics Co., Ltd., 1-1 Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do, 18848, Korea. hojun86.lee@samsung.com.

Scientific reports
|May 7, 2024
PubMed
概括

本研究介绍了一种使用光斑照明的计算成像方法,用于在没有镜头的晶圆检查系统中增强分辨率和视野. 该技术在1.8mm2的面积上实现1.7μm的分辨率,改善了半导体计量学.

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Total Internal Reflection Fluorescence Microscopy01:05

Total Internal Reflection Fluorescence Microscopy

Total internal reflection fluorescence microscopy or TIRF is an advanced microscopic technique used to visualize fluorophores in samples close to a solid surface with a higher refractive index, such as a glass coverslip. TIRF only allows fluorophores in proximity to the solid surface to be excited. When light from a medium with a lower refractive index (such as air) hits the glass coverslip at a critical angle, the light undergoes total internal reflection stead of passing through the glass.
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