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在PdNi薄膜中的Pd氧化状态对表面声波探测性能的影响

Jing Jin¹, Baile Cui^1,2, Linyu Zhou³

¹State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, P. R. China.

|May 9, 2024

概括

由于表面氧化,PdNi合金薄膜在气传感器中降解. 这项研究确定了氧化氧化物形成作为故障机制,并提出了一种方法,通过减少氧化表面来恢复传感器性能.

科学领域:

材料科学材料科学材料科学
化学工程是化学工程的重要组成部分.
表面科学是一门学科.

背景情况:

- (PdNi) 合金薄膜在表面声波 (SAW) 传感器方面表现有前途.
在运行过程中,长期稳定性问题困扰着基于PdNi的SAW传感器.

研究的目的:

研究SAW传感器中PdNi薄膜的故障机制.
确定表面物种在降低探测能力方面的作用.
提出一种方法来提高这些传感器的长期稳定性和性能.

主要方法:

在操作条件下使用X射线光电子光谱 (XPS) 来分析PdNi薄膜的表面成分.
密度函数理论 (DFT) 的计算被用来研究氧化PdNi表面上的扩散障碍.
为了恢复传感器性能,测试了一种在70°C处处理气氛的方法.

主要成果:

XPS分析显示,氧化 (PdO) 物种的形成是导致探测失败的关键因素.
DFT的计算表明,PdNiOx表面的能量屏障阻碍了气扩散.
在气氛下的热处理部分恢复了探测响应,表明PdO减少到金属Pd.

结论:

在PdNi薄膜上形成PdO物种被确定为传感器故障的主要原因.
了解这些故障机制,特别是表面氧化和扩散障碍,对于开发稳定的气体传感器至关重要.
在气氛下减少氧化表面的后处理方法可以部分恢复传感器的性能,为改善长期稳定性提供了一条途径.

关键词:

在SAW H2传感器上.PdHx 的能量障碍.失效机制的故障机制这样就形成了PdNiOx的形成.减少的减少.

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