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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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批量光谱平面平坦度测量基于相位测量偏移计.

Zhuotong Li1, Dongxue Wang1, Lei Liu1

  • 1State Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China.

Sensors (Basel, Switzerland)
|May 11, 2024
PubMed
概括

这项研究提出了一种新的方法,用于高精度,快速测量多个表面,提高制造效率. 该技术可确保对批量镜面表面进行准确的3D表面造型.

科学领域:

  • 计量学 计量学 计量学
  • 光学测量 测量 光学测量
  • 表面计量学 表面计量学

背景情况:

  • 平度在制造过程中至关重要,影响产品的适应性和性能.
  • 当前的测量技术缺乏精度和效率之间的平衡.
  • 制造业的进步需要更准确,更快速的测量解决方案.

研究的目的:

  • 引入一种新的方法,用于高精度和多重表面的快速测量.
  • 解决现有方法在平衡准确性和效率方面的局限性.
  • 允许对镜面表面进行快速和同步的批量测量.

主要方法:

  • 增强的相位测量偏移计 (PMD) 技术.
  • 基于离散表面的极线和正常向量约束的匹配.
  • 平面预定位方法,以提高双眼相匹配效率.

主要成果:

  • 实现了对多个表面的高精度和快速测量.
  • 成功地对镜面表面进行了快速和同步的批量测量.
  • 为每一个测量表面获得精确的三维表面形状.

结论:

关键词:
批量 镜面 平面 平面度分散的表面测量测量.阶段测量偏向测量法测量法.快速重建的重建工作

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  • 拟议的方法可以准确地对镜面平面进行批量测量.
  • 增强的PMD方法克服了传统方法的局限性.
  • 该技术支持对高效和精确制造测量的日益增长的需求.