Peiyu Song1,2, Weibo Wang1,2, Biwei Wu1,2

  • 1Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China.

PubMed
概括

先进的集成电路需要精确的对齐. 一种自适应加权方法有效地纠正了由不可预测的标记不对称性引起的对齐错误,实现了关键半导体制造工艺的亚纳米准确性.

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