基于多通道对齐的错误分布特征的自适应加权错误纠正方法
Peiyu Song1,2, Weibo Wang1,2, Biwei Wu1,2
1Center of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China.
Sensors (Basel, Switzerland)
|May 11, 2024
概括
先进的集成电路需要精确的对齐. 一种自适应加权方法有效地纠正了由不可预测的标记不对称性引起的对齐错误,实现了关键半导体制造工艺的亚纳米准确性.
科学领域:
- 半导体制造业 半导体制造业
- 集成电路设计 集成电路设计
- 计量学 计量学 计量学
背景情况:
- 减少过程节点 (低于10nm) 要求集成电路中更严格的重叠精度.
- 亚纳米调整位置的准确性对于晶圆调整传感器至关重要.
- 阶段格对齐 (PGA) 提供了高精度,但受到标记不对称性错误的阻碍.
研究的目的:
- 为了应对标记不对称的挑战,在实现亚纳米度对齐准确性方面.
- 开发一种用于纠正PGA技术中不可预测的对齐错误的新方法.
主要方法:
- 提出了一种利用多通道错误分布特征的自适应加权方法.
- 模拟了多对齐错误分布和标记不对称性之间的相关性.
- 开发了一种基于错误分布的重量构造方法,假设二次线性关系.
主要成果:
- 模拟证实了错误分布和标记不对称性之间的强烈相关性.
- 适应加权方法实现了0.01nm的根平均平方 (RMS) 余误差.
- 这显著优于固定加权方法在典型标记不对称性方面的14.0nm的RMS.
结论:
- 适应加权方法有效地纠正由不可预测的标记不对称性引起的对齐错误.
- 这种方法在先进的半导体制造中为亚纳米对齐提供了稳定和高度准确的解决方案.
- 拟议的方法克服了固定权重方法在处理复杂不对称性的局限性.
相关概念视频
Errors in Taping
23
Errors in taping arise from multiple factors that can significantly impact measurement accuracy in surveying. Misalignment of the tape, often due to human error, is one primary source. A skilled rear tapeman, using a telescope, can help correct alignment by guiding the head tapeman; however, human limitations still lead to small inaccuracies. These errors may include misplacement of pins or inaccurate tape readings due to common visual confusions, such as mistaking a six for a nine. Such...
23
Systematic Error: Methodological and Sampling Errors
1.5K
In the case of systematic errors, the sources can be identified, and the errors can be subsequently minimized by addressing these sources. According to the source, systematic errors can be divided into sampling, instrumental, methodological, and personal errors.
Sampling errors originate from improper sampling methods or the wrong sample population. These errors can be minimized by refining the sampling strategy. Defective instruments or faulty calibrations are the sources of instrumental...
Sampling errors originate from improper sampling methods or the wrong sample population. These errors can be minimized by refining the sampling strategy. Defective instruments or faulty calibrations are the sources of instrumental...
1.5K
Distance Corrections
27
To achieve precise distance measurements, especially in surveying and construction, certain corrections must be applied to account for potential sources of error like the standardization errors, temperature variations, and slope adjustments.Standardization error emerges when measurement equipment undergoes changes, such as wear, repairs, or weather impacts. To address this, surveyors compare the equipment’s readings to a standard. This process identifies any deviation that might lead to...
27
Random and Systematic Errors
10.9K
Scientists always try their best to record measurements with the utmost accuracy and precision. However, sometimes errors do occur. These errors can be random or systematic. Random errors are observed due to the inconsistency or fluctuation in the measurement process, or variations in the quantity itself that is being measured. Such errors fluctuate from being greater than or less than the true value in repeated measurements. Consider a scientist measuring the length of an earthworm using a...
10.9K
Errors in Global Positioning System
44
Global Positioning System (GPS) technology has revolutionized navigation and positioning, but its accuracy is often compromised by various errors. These errors, stemming from environmental, satellite, and receiver-related factors, require careful mitigation to ensure reliable performance across applications.Atmospheric ErrorsGPS signals travel through the Earth’s ionosphere and troposphere, introducing delays which affect accuracy. The ionosphere is strongly influenced by charged particles,...
44
Types of Errors: Detection and Minimization
1.6K
Error is the deviation of the obtained result from the true, expected value or the estimated central value. Errors are expressed in absolute or relative terms.
Absolute error in a measurement is the numerical difference from the true or central value. Relative error is the ratio between absolute error and the true or central value, expressed as a percentage.
Errors can be classified by source, magnitude, and sign. There are three types of errors: systematic, random, and gross.
Systematic or...
Absolute error in a measurement is the numerical difference from the true or central value. Relative error is the ratio between absolute error and the true or central value, expressed as a percentage.
Errors can be classified by source, magnitude, and sign. There are three types of errors: systematic, random, and gross.
Systematic or...
1.6K


