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压力控制的形成能量和空缺的迁移在Al1-ScN:一个第一原则研究
Qinghua Ren1, Xin Liu1, Zexin Ding1
1School of Microelectronics, Shanghai University, Shanghai 200444, People's Republic of China.
应变工程影响了AlScN的气空缺. 压缩应变最大限度地减少了形成能量和迁移障碍,而拉力应变则阻碍了它们,提供了一种管理铁电降解的方法.
科学领域:
- 材料科学 材料科学 材料科学
- 固态物理 固态物理
- 计算材料科学科学 计算材料科学
背景情况:
- 空位 (VNs) 影响酸 (AlScN) 的特性.
- 了解VN行为对于优化基于AlScN的设备至关重要.
- 在AlScN中的铁电降解通常与VNs.有关.
研究的目的:
- 研究应变对VN形成能量和AlScN.中的迁移的影响.
- 探索应变工程作为一种控制VNs.的方法.
- 为减轻铁电降解提供洞察力.
主要方法:
- 使用了第一原则计算.
- 总能量的计算确定了VN形成能量.
- 登的弹性带方法计算了迁移障碍.
主要成果:
- 形成能量VN可根据应变调整,随着压力应变而降低至4%的4.11 eV的最低值.
- 拉伸应变 (+4%) 增加了VN的形成能量.
- 迁移障碍取决于应变,较低的障碍 (2.46 eV) 应变为-4%,较高的障碍 (2.71 eV) 应变为+4%.
结论:
- 拉力应变有效地抑制了AlScN中VN的形成和迁移.
- 应变工程为调整VN行为提供了一个可行的策略.
- 通过应变控制VNs可能有助于缓解AlScN设备中的铁电降解.
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